Deposition Solutions | ECD Panel

Panel Plating - Stratus™ P500

ECD 510 x 515 mm Panel Processing

Applications

• Configurable for up to 5 metals
• Multi-chip Fan Out
• SoC packages
• MicroLED

Features

• Wafer level precision hardware and software
• Cu, Sn(Ag), Ni & Au plating @<10µm L/S
• Single/Dual sided plating
• Membrane cells provide high chemistry utilization
• Multi-zone anodes for optimized uniformity with thick and thin seeds
• Patterned shields for uniform high throughput plating

Substrates

• 510×515 mm panels, custom
• Glass, Composite, Other

Broschüre & Video

Anfrage