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Plasma Cleaning

The CM-PLASMA is an automatic plasma cleaning system for CMOS Image Sensor to ensure top-notch module cleanliness for the highest production yield. The CM-PLASMA offers a highly efficient cleaning process under electrostatic discharge-free conditions. Excellent die attach strength, fillet uniformity, great bondability and cleaning efficiencies are also guaranteed.


Automatic Plasma Cleaning System

Dimensions W x D x H
1,500 x 940 x 1,600 mm


  • Highly efficient plasma cleaning system
  • Electrostatic discharge (ESD) FREE
  • Applicable to wide range of substrates
    • PCB, lead frame, metal carrier, etc.
  • In-line capability to enhance cleaning efficiency
    • In-lining with ASMPT’s DI-water cleaning machine (CM-AQUA)


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