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Wafer Sputtering - Apollo 300

Apollo Under Bump Metallization (UBM) is an in-line physical vapor deposition system for customers who manufacture multiple advanced packaging features, such as a range of copper redistribution layers (RDL), the Apollo UBM produces both thick and thin films in the most compact footprint on the market. More information

Applications
  • Configurable for up to 5 metals
  • UBM/RDL
  • Fan Out
  • RF Filters
  • Power Devices
Features
  • True Bridge tool capability: Size Change
  • Degas/Anneal
  • ICP/CCP Etch
Substrates
  • 200 and 300 mm wafers
  • Warped and heavy wafer processing
  • Silicon, EMC, RCP, Glass, Bonded

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